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High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing

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High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing

Brand Name : ZMSH

Certification : rohs

Place of Origin : China

MOQ : 5

Price : 100

Payment Terms : T/T

Supply Ability : 1000per month

Delivery Time : 3-4 week

Packaging Details : Foam Cushion + Carton box

Surface Resistance : 10⁴~10⁹Ω

Size : Customizable (for 4–12 inch wafers)

Purity : 99.9%

Density : D=8.91（g/cm3）

Diameter : 25-500 um

Application : Package test, chip sorting

Mechanical Strength : Flexural strength > 400 MPa

Resistivity : 0.1~60ohm.cm

Thermal Resistance : 1600 ℃

Chemical Resistance : Resistant to acids, bases, and plasma

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Product Description:

Our SiC end effectors are designed for ultra-clean wafer handling in semiconductor manufacturing environments. Manufactured using high-purity silicon carbide, these forks provide exceptional thermal resistance, chemical stability, and mechanical strength—making them ideal for use in harsh process chambers such as etching, deposition, and high-temperature transport systems.

The dense, fine-grain SiC body ensures low particle generation, excellent dimensional stability, and compatibility with 200mm to 300mm wafers. Custom designs are available for specific robotic arms and wafer carriers.

Key Features:

  • Material: High-purity Silicon Carbide (SiC)

  • Excellent thermal resistance (up to 1600°C)

  • Superior chemical and plasma corrosion resistance

  • High mechanical strength and rigidity

  • Low particle generation for cleanroom use

  • Available for 4", 6", 8", and 12" wafer handling

  • Custom shapes and slots for robotic compatibility

Product Specifications:

Parameter Specification
Material High-purity SiC (≥99%)
Size Customizable (for 4–12 inch wafers)
Surface Finish Polished or matte per requirement
Thermal Resistance Up to 1600°C
Chemical Resistance Resistant to acids, bases, and plasma
Mechanical Strength Flexural strength > 400 MPa
Cleanroom Grade Suitable for Class 1–100

High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor ProcessingHigh Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor ProcessingHigh Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor ProcessingHigh Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor ProcessingHigh Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor ProcessingHigh Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing

Keywords / Tags:

#SiCEndEffector #WaferHandling #SiCFork #SemiconductorEquipment #WaferTransfer #HighPuritySiC #SiCWaferCarrier #SemiconductorAutomation #VacuumCompatible #SiCComponent #EtchingToolPart #RoboticWaferHandling


Product Tags:

Semiconductor Processing SiC End Effector

      

Wafer Handling SiC End Effector

      

Corrosion Resistant SiC End Effector

      
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing Manufactures

High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing Images

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